TwoStage PlasmaThermal Nitridation Processes for the ...
Jan 24, 2019· 2. Materials and Methods . In this study, a twostage synthesis process for fabricating AlN powders was carried out. In the first stage, an Al (ThinTech Materials Tech. Co., Ltd., Kaohsiung, Taiwan purity: %; particle size: 2–5 μm)/NH 4 Cl (SigmaAldrich, Saint Louis, MO purity: %; particles sizes: 1–4 μm) ingot (thickness ~5 mm) was prepared at 2000 psi by a tablet machine and ...